{"id":88,"date":"2024-04-03T17:06:56","date_gmt":"2024-04-03T09:06:56","guid":{"rendered":"http:\/\/siliconcarbideceramic.net\/?p=88"},"modified":"2024-04-03T17:06:57","modified_gmt":"2024-04-03T09:06:57","slug":"vyhody-karbidu-kremika-2","status":"publish","type":"post","link":"https:\/\/siliconcarbideceramic.net\/sk\/advantages-of-silicon-carbide-wafer-2\/","title":{"rendered":"V\u00fdhody karbidu krem\u00edka"},"content":{"rendered":"<p>Karbid krem\u00edka je umel\u00e1 zl\u00fa\u010denina krem\u00edka a uhl\u00edka, ktor\u00e1 m\u00e1 v\u00fdnimo\u010dn\u00e9 elektrick\u00e9 a tepelne odoln\u00e9 vlastnosti.<\/p>\n<p>Odolnos\u0165 vo\u010di teplotn\u00fdm \u0161okom rob\u00ed tento materi\u00e1l ide\u00e1lnym na pou\u017eitie vo v\u00fdkonov\u00fdch polovodi\u010doch a infra\u0161trukt\u00fare nab\u00edjania elektrick\u00fdch vozidiel, ktor\u00e9 zabezpe\u010duj\u00fa prechodn\u00e9 mechanick\u00e9 za\u0165a\u017eenie sp\u00f4soben\u00e9 n\u00e1hlymi zmenami teploty. T\u00e1to vlastnos\u0165 z neho rob\u00ed ide\u00e1lnu vo\u013ebu materi\u00e1lu, ke\u010f sa zva\u017euje odolnos\u0165 proti teplotn\u00fdm \u0161okom ako po\u017eiadavka na pou\u017eitie.<\/p>\n<h2>Vysok\u00e1 tepeln\u00e1 vodivos\u0165<\/h2>\n<p>Vysok\u00e1 tepeln\u00e1 vodivos\u0165 krem\u00edkovo-karbidov\u00fdch (SiC) do\u0161ti\u010diek z nich rob\u00ed hlavn\u00e9ho kandid\u00e1ta pre elektronick\u00e9 zariadenia, ktor\u00e9 pracuj\u00fa pri vysokej teplote aj nap\u00e4t\u00ed, ako s\u00fa v\u00fdkonov\u00e9 polovodi\u010de pou\u017e\u00edvan\u00e9 v elektrick\u00fdch vozidl\u00e1ch alebo technol\u00f3gii 5G, \u010di vysokor\u00fdchlostn\u00e9 senzory. Schopnos\u0165 odol\u00e1va\u0165 n\u00e1ro\u010dn\u00fdm podmienkam, ak\u00e9 sa vyskytuj\u00fa v leteckom a kozmickom priemysle, odli\u0161uje SiC od in\u00fdch materi\u00e1lov na v\u00fdrobu do\u0161ti\u010diek.<\/p>\n<p>V\u00fdroba SiC do\u0161ti\u010diek si vy\u017eaduje nieko\u013eko kritick\u00fdch krokov. Najprv sa monokry\u0161t\u00e1lov\u00e9 ingoty rozre\u017e\u00fa na tenk\u00e9 pl\u00e1tky pomocou presnej p\u00edly. Potom sa tieto pl\u00e1tky podrobia chemickej a mechanickej \u00faprave, aby sa dosiahol jednotn\u00fd povrch a hr\u00fabka, a potom sl\u00fa\u017eia ako z\u00e1klad pre fotolitografiu, leptanie a depozi\u010dn\u00e9 procesy, ktor\u00e9 vytv\u00e1raj\u00fa polovodi\u010dov\u00e9 zariadenia.<\/p>\n<p>In\u017einierstvo a v\u00fdskum s\u00fa v tomto procese nevyhnutn\u00e9, najm\u00e4 preto, \u017ee karbid krem\u00edka je ove\u013ea tvrd\u0161\u00ed ako jeho krem\u00edkov\u00fd ekvivalent, a preto jeho rezanie trv\u00e1 podstatne dlh\u0161ie ako rezanie jeho ekvivalentu krem\u00edkovej gu\u013e\u00f4\u010dky. Met\u00f3dy kr\u00e1jania sa preto musia starostlivo kalibrova\u0165.<\/p>\n<p>V s\u00fa\u010dasnosti je k dispoz\u00edcii viacero met\u00f3d na v\u00fdrobu vysokokvalitn\u00fdch SiC do\u0161ti\u010diek. Jednou z tak\u00fdchto met\u00f3d je laserov\u00e9 rezanie; tento pr\u00edstup sa osved\u010dil najm\u00e4 pri ve\u013ek\u00fdch a tvrd\u00fdch materi\u00e1loch, ako je SiC; tento proces v\u0161ak m\u00f4\u017ee by\u0165 drah\u00fd a jeho \u00faspe\u0161n\u00e1 realiz\u00e1cia si vy\u017eaduje zna\u010dn\u00e9 technick\u00e9 \u00fasilie.<\/p>\n<h2>Vysok\u00e1 odolnos\u0165 vo\u010di tepeln\u00fdm \u0161okom<\/h2>\n<p>Karbid krem\u00edka sp\u00f4sobuje revol\u00faciu vo v\u00fdkonovej elektronike. V\u010faka svojej schopnosti odol\u00e1va\u0165 vysok\u00fdm teplot\u00e1m a nap\u00e4tiam sa tieto do\u0161ti\u010dky stali z\u00e1kladn\u00fdmi komponentmi elektrick\u00fdch vozidiel a syst\u00e9mov obnovite\u013en\u00fdch zdrojov energie. Ich \u0161irok\u00fd p\u00e1sov\u00fd odstup im umo\u017e\u0148uje pracova\u0165 s vy\u0161\u0161\u00edmi frekvenciami ako tradi\u010dn\u00e9 polovodi\u010dov\u00e9 materi\u00e1ly.<\/p>\n<p>SiC je extr\u00e9mne tvrd\u00fd keramick\u00fd materi\u00e1l, ktor\u00fd je navrhnut\u00fd tak, aby odol\u00e1val extr\u00e9mnym teplot\u00e1m a z\u00e1rove\u0148 odol\u00e1val chemick\u00fdm vplyvom, \u010do z neho rob\u00ed ide\u00e1lny materi\u00e1l na pou\u017eitie v perif\u00e9rnych ohrieva\u010doch a polovodi\u010dov\u00fdch peciach. Okrem toho jeho odolnos\u0165 vo\u010di teplotn\u00fdm \u0161okom pom\u00e1ha obmedzi\u0165 po\u0161kodenie sp\u00f4soben\u00e9 n\u00e1hlymi zmenami teploty.<\/p>\n<p>Karbid krem\u00edka pon\u00faka viac ako len odolnos\u0165 vo\u010di tepeln\u00fdm \u0161okom; m\u00f4\u017ee sa pochv\u00e1li\u0165 aj n\u00edzkym koeficientom tepelnej roz\u0165a\u017enosti, \u010do znamen\u00e1, \u017ee jeho roz\u0165ahovanie a zmr\u0161\u0165ovanie prebieha pribli\u017ene rovnakou r\u00fdchlos\u0165ou, \u010d\u00edm sa zachov\u00e1vaj\u00fa jeho rozmery v extr\u00e9mnych podmienkach. V\u010faka tejto vlastnosti je karbid krem\u00edka ide\u00e1lny na v\u00fdrobu mal\u00fdch zariaden\u00ed, ktor\u00e9 obsahuj\u00fa viac tranzistorov na jednom \u010dipe.<\/p>\n<p>Materi\u00e1l karbidu krem\u00edka sa m\u00f4\u017ee vyr\u00e1ba\u0165 bu\u010f spekan\u00edm elektrick\u00fdm obl\u00fakom pri vysok\u00fdch teplot\u00e1ch vo v\u00e1kuovej peci, alebo chemick\u00fdm naparovan\u00edm (CVD), pri ktorom sa \u0161pecializovan\u00e9 plyny dost\u00e1vaj\u00fa do v\u00e1kuov\u00e9ho prostredia a sp\u00e1jaj\u00fa sa za vzniku kubick\u00fdch kry\u0161t\u00e1lov karbidu krem\u00edka, ktor\u00e9 sa potom nan\u00e1\u0161aj\u00fa na substr\u00e1ty pomocou suspenzie alebo diamantov\u00fdch n\u00e1strojov.<\/p>\n<h2>Stabilita pri vysok\u00fdch teplot\u00e1ch<\/h2>\n<p>Karbid krem\u00edka m\u00e1 v\u00fdnimo\u010dn\u00e9 elektrick\u00e9 a tepeln\u00e9 vlastnosti, ktor\u00e9 z neho robia ide\u00e1lny materi\u00e1l pre aplik\u00e1cie v\u00fdkonovej elektroniky. Ich \u0161irok\u00fd p\u00e1sov\u00fd odstup im umo\u017e\u0148uje odol\u00e1va\u0165 vy\u0161\u0161\u00edm teplot\u00e1m a nap\u00e4tiam ako in\u00e9 polovodi\u010dov\u00e9 materi\u00e1ly; okrem toho ich vysok\u00e1 pohyblivos\u0165 elektr\u00f3nov im umo\u017e\u0148uje efekt\u00edvnej\u0161ie sprac\u00fava\u0165 v\u00e4\u010d\u0161ie pr\u00fady, \u010do vedie k r\u00fdchlej\u0161ej odozve a vy\u0161\u0161ej hustote energie.<\/p>\n<p>V\u00fdroba SiC do\u0161ti\u010diek sa za\u010d\u00edna s monokry\u0161t\u00e1lov\u00fdmi ingotmi vysoko \u010dist\u00e9ho zaf\u00edru, germ\u00e1nia alebo krem\u00edka. Po narezan\u00ed na tenk\u00e9 pl\u00e1tky presnou p\u00edlou tieto ingoty prejd\u00fa nieko\u013ek\u00fdmi chemick\u00fdmi a mechanick\u00fdmi procesmi, aby sa dosiahol rovn\u00fd a hladk\u00fd povrch, ktor\u00fd sl\u00fa\u017ei ako pl\u00e1tno, na ktorom sa bud\u00fa formova\u0165 zariadenia, ako je fotolitografia, leptanie a nan\u00e1\u0161anie.<\/p>\n<p>Karbid krem\u00edka je chemick\u00e1 zl\u00fa\u010denina zlo\u017een\u00e1 z \u010dist\u00e9ho krem\u00edka a uhl\u00edka, ktor\u00e1 m\u00f4\u017ee by\u0165 dopovan\u00e1 dus\u00edkom alebo fosforom na v\u00fdrobu polovodi\u010dov typu n alebo g\u00e1liom, hlin\u00edkom alebo b\u00f3rom na v\u00fdrobu polovodi\u010dov typu p. V\u010faka svojej odolnosti vo\u010di kor\u00f3zii, n\u00edzkej teplote topenia a tepelnej stabilite sa PEEK m\u00f4\u017ee vyu\u017e\u00edva\u0165 v mnoh\u00fdch priemyseln\u00fdch aplik\u00e1ci\u00e1ch - od podstavcov a lopatiek na podnosy pre polovodi\u010dov\u00e9 pece a\u017e po podstavce a lopatky na podnosy pou\u017e\u00edvan\u00e9 ako mechanizmy na prenos pl\u00e1tkov. V\u00fdnimo\u010dn\u00e1 pevnos\u0165 a odolnos\u0165 karbidu krem\u00edka z neho rob\u00ed ide\u00e1lny materi\u00e1l na pou\u017eitie v zariadeniach na regul\u00e1ciu teploty a nap\u00e4tia, ako s\u00fa termistory a varistory. Okrem toho tento vysoko odoln\u00fd materi\u00e1l dobre zn\u00e1\u0161a vystavenie \u017eiareniu, ako aj chemick\u00e9 \u00fatoky - vlastnosti, ktor\u00e9 viedli k jeho \u0161irok\u00e9mu roz\u0161\u00edreniu v energetick\u00fdch aplik\u00e1ci\u00e1ch, ako s\u00fa elektrick\u00e9 aut\u00e1 a nab\u00edjacia infra\u0161trukt\u00fara.<\/p>\n<h2>Vysok\u00e1 odolnos\u0165<\/h2>\n<p>Karbid krem\u00edka odol\u00e1va extr\u00e9mnym teplot\u00e1m a nap\u00e4tiam, \u010do z neho rob\u00ed vynikaj\u00facu vo\u013ebu pre elektronick\u00e9 zariadenia, ktor\u00e9 potrebuj\u00fa vysok\u00fd v\u00fdkon v n\u00e1ro\u010dn\u00fdch prostrediach, ako s\u00fa elektrick\u00e9 vozidl\u00e1, premena sol\u00e1rnej energie, bezdr\u00f4tov\u00e9 technol\u00f3gie 5G alebo leteck\u00e1 elektronika.<\/p>\n<p>Dosky z karbidu krem\u00edka (SiC) sa vyr\u00e1baj\u00fa z monokry\u0161talick\u00fdch ingotov zaf\u00edru, germ\u00e1nia alebo krem\u00edka, ktor\u00e9 sa pomocou presn\u00fdch p\u00edl rozre\u017e\u00fa na dosky. Po vyle\u0161ten\u00ed a \u00faprave pomocou chemick\u00fdch a mechanick\u00fdch procesov na dosiahnutie rovnomern\u00e9ho povrchu a rovnomernej hr\u00fabky sa SiC do\u0161ti\u010dky st\u00e1vaj\u00fa ide\u00e1lnymi kandid\u00e1tmi na spracovanie fotolitografiou, leptan\u00edm alebo procesmi nan\u00e1\u0161ania.<\/p>\n<p>Obr\u00fasky SiC s\u00fa po\u010das v\u00fdroby vystaven\u00e9 siln\u00e9mu nam\u00e1haniu a otrasom. Vzh\u013eadom na krehkos\u0165 tohto materi\u00e1lu sa pri manipul\u00e1cii s n\u00edm musia dodr\u017eiava\u0165 bezpe\u010dnostn\u00e9 opatrenia, napr\u00edklad pracovn\u00edci by mali nosi\u0165 ochrann\u00e9 prostriedky, aby sa zabr\u00e1nilo vd\u00fdchnutiu prachu a kontamin\u00e1cii.<\/p>\n<p>SiC je \u0161irokop\u00e1smov\u00fd polovodi\u010dov\u00fd materi\u00e1l, ktor\u00fd v porovnan\u00ed s be\u017en\u00fdmi zariadeniami na b\u00e1ze krem\u00edka pon\u00faka vynikaj\u00face teplotn\u00e9 a frekven\u010dn\u00e9 parametre. V\u010faka tomu je SiC atrakt\u00edvnym materi\u00e1lom pre spolo\u010dnosti ako ON Semiconductor (ON) a Wolfspeed (WOLF), ktor\u00e9 vyr\u00e1baj\u00fa v\u00fdkonov\u00e9 polovodi\u010de na substr\u00e1toch z karbidu krem\u00edka.<\/p>\n<p>Kvalitn\u00e9 do\u0161ti\u010dky zohr\u00e1vaj\u00fa z\u00e1sadn\u00fa \u00falohu pri ich vhodnosti na r\u00f4zne aplik\u00e1cie. Triedenie pl\u00e1tkov z karbidu krem\u00edka - Prime a Research - stanovuje prahov\u00e9 hodnoty v\u00fdkonu, ktor\u00e9 musia dosiahnu\u0165, aby pomohli in\u017einierom dosiahnu\u0165 po\u017eadovan\u00e9 v\u00fdsledky. Platni\u010dky triedy Prime sa m\u00f4\u017eu pochv\u00e1li\u0165 n\u00edzkou hustotou defektov a hustotou mikrotrubi\u010diek, \u010do zaru\u010duje minim\u00e1lne nedokonalosti, ktor\u00e9 by mohli napr\u00edklad zmeni\u0165 funk\u010dnos\u0165 zariadenia.<\/p>","protected":false},"excerpt":{"rendered":"<p>Silicon carbide wafer is an artificial compound of silicon and carbon that offers exceptional electrical and heat resistant properties. Thermal [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[],"class_list":["post-88","post","type-post","status-publish","format-standard","hentry","category-sic-knowledge"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/siliconcarbideceramic.net\/sk\/wp-json\/wp\/v2\/posts\/88","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/siliconcarbideceramic.net\/sk\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/siliconcarbideceramic.net\/sk\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/siliconcarbideceramic.net\/sk\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/siliconcarbideceramic.net\/sk\/wp-json\/wp\/v2\/comments?post=88"}],"version-history":[{"count":1,"href":"https:\/\/siliconcarbideceramic.net\/sk\/wp-json\/wp\/v2\/posts\/88\/revisions"}],"predecessor-version":[{"id":89,"href":"https:\/\/siliconcarbideceramic.net\/sk\/wp-json\/wp\/v2\/posts\/88\/revisions\/89"}],"wp:attachment":[{"href":"https:\/\/siliconcarbideceramic.net\/sk\/wp-json\/wp\/v2\/media?parent=88"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/siliconcarbideceramic.net\/sk\/wp-json\/wp\/v2\/categories?post=88"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/siliconcarbideceramic.net\/sk\/wp-json\/wp\/v2\/tags?post=88"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}